Gas Sources
NH3, CBr4, AsH3, PH3, Organometallics
Low/High Temperature Injectors |
High temperature gas injector for safe and precise complete cracking of highly stable compounds: NH3, AsH3, PH3, TBAs, TBP … |
Low/High Temperature Injectors |
Low temperature heated gas injector for safe and precise handling of metalorganics: CBr4, SiH4, TEGa, TMIn, DMEAl, etc |