The Riber MBE 49 series of fully automated, silicon-style machines sets industry standards for material quality, yield, throughput, and costs associated with operation and maintenance. More than 40 of these systems are in operation worldwide, and the success that they have brought their customers has given this series of reactors a widely held and thoroughly deserved reputation for producing state-of-the-art epitaxial material.
Four reactors are available in the MBE 49 series, which are specifically designed for depositing arsenides, phosphides, nitrides and oxides. These industry-leading machines have a capacity of four 4-inch wafers or five 3-inch wafers and feature the capabilities for in-situ monitoring and pre-growth treatment.
For more information, please contact Riber.
- Up to 1x8", 1x6", 4x4", 5x3", 14x2" wafers
- Up to 12 large ports for cells or sources
- Quantum Dots Lasers
- GaN (RF or NH3)
- MCT sensors