MBE 6000
Up to 300 mm
The Riber MBE 6000 is a high-throughput, fully automated silicon-style machine that delivers industry-leading levels of reliability, yield, cost-effectiveness and reproducibility. This system, which has a capacity of nine 4-inch wafers or four 6-inch wafers, has been installed at 16 of the leading the gallium arsenide foundries throughout the world.
The MBE 6000 has 11 source ports, a suite of in-situ characterization tools and a capability to load up to ten platens at one time. Throughput with this industry-leading tool can hit 13,500 6-inch wafers per year.
For more information, please contact Riber.
Key features
- Up to 9x4", 4x6" wafers
- 11 large cell/source ports
- 10 platens
- pHEMT
- HBT
- Lasers
- VCSEL
- GaN
- Industry leading levels of reliability