Riber's MBE 412 is the perfect choice for highly reliable, low-cost growth of arsenides, phosphides, antimonides, nitride, oxides and silicon germanium films on a single 4-inch wafer.
This exceptionally versatile machine produces film thickness uniformities of less than one percent and features 12 cell ports symmetrically distributed around the chamber. These ports can be mounted with a vast range of sources, including effusion cells, crackers, plasma sources, gasinjectors, and electron-beam-heated sources.
For more information, please contact Riber.
- Up to 4" or multi wafer
- 12 big ports for cell/source
- Up to 8 Egun pockets