Arsenic Valved Cracker Sources
VAC SERIES
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High quality and reliable field-proven design
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Very easy refilling and maintenance operations
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Optimized As consumption leading to longer growth campaigns
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Excellent flux uniformity leading to superior epiwafer quality
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Highly reproducible and precise control of Arsenic flux
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Very large range of loading capacity
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Characteristics
| characteristics | S40 VAC500 | S63 VAC3K | S100 VAC6K |
|---|---|---|---|
| Filament | Two | ||
| Heating filaments | Wire | Flat + Wire | |
| Thermocouple | Double C-Type | ||
| Crucible / valve material | Titanium/Titanium Mo gaskets | ||
| Usefull capacity (Max load dimensions cc) | 500cc | 2900cc | 6000cc |
| Mounting flange (min) | CF 40 ( 2.75'') | CF 63 (4.5'') | CF 100 (6'') |
| Reservoir typical operating temperature | 400°C | ||
| Tip typical temperature | 650°C - 950°C | ||
| Temperature stability | +/- 0.2°C | ||
| Tip Characteristics | |||
| Max outgassing temperature | 1300°C | ||
| Power consumption | 300W max | 400W max | 1200W max |
| Power supply recommended | 12.5A-60V | 19A-80V | 30A-80V |
| Power output connector | Uniplug 3mm² | SPC | Uniplug 2.5mm² |
| Thermocouple connector | Omega NMP C-Type | ||
| Reservoir Characteristics | |||
| Fill port diameter | 68 | 120 | 160 |
| Max outgassing temperature | 550°C | ||
| Power consumption | 300W max | 570W max | 640W max |
| Power supply recommended | 12.5A-60V | 19A-80V | 10A-100V |
| Power output connector | 2x(uniplug 3mm²) | SPC | SPC |
| Thermocouple connector | Omega NMP C-Type | ||
| Water connection | Swagelok fitting Ø6 female | ||
| Water flow | Min. flow 0.5l/mn - 7 Bar max | ||
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