For a complete blocking of species
An alternative to the built-in shutter
- Very long lifetime
Simple mechanical design
No particule generation
Minimize flux transient
The shutter and its air motor are mounted on a CF40-CF63 fitting 80mm which incorporates the twist grip and the shutter mechanism. The cell can be removed from the system without having to remove the entire shutter, etc.
Source shutters are driven with motors allowing gentle and controlled opening and closing to reduce particle flaking and particule generation. Motion is performed so that in close position, shutters cover the entire source mouth ,whereas is open position, they are recessed behind the cryopanel, protecting it from contamination.
||Source Flange||Dimensions (mm)||Recommended System|
|ICS||63||40||372||210||90||181||Compact 12 / Siva 21|
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