Automatic Impedance Matcher
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Controller unit & AIM network connected with single cable
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Embedded RS232-C interface extendable with a RS422/485 expansion unit
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Paddle provided to give a convenience control
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Optical Emission Detector provided to control neutral/excited species
Characteristics
The RIBER Automatic Impedance Matcher (AIM) is a Pi-type matching network designed to adapt the variable impedance of RIBER's inductively coupled plasma source to standard 13.56Mhz 50Ω RF generators, as to automatically minimize RF power reflected on the generator in all source working conditions. Additionally, when an analog signal is provided to measure the plasma intensity, such as with our RF Source Optical Monitor, it offers the possibility to regulate the RF input power and stabilize the source against drifts caused by discharge pressure variations, thermal fluctuations, shutter caused transients or inner cavity surface evolutions, thanks to a closed loop PID control built on top of the impedance matching system.
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