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JET – LINE High Temperature Source

Designed for CZTS, CIGS, OLED

Details

Module design enables substrate up to Gen 6
Quick material loading cycles
Chunks or Ingots material loading
Liquid an solid material compatible
Vertical or horizontal positioning of the source: fully scalable
Reduce heat up of substrate : <35°C when source at 1300°C with displacement speed of 1.5m/min
Low power consumption : 5kW for 1250°C (5 modules)

Presentation

JET-Line source uses pure materials, making it possible to avoid all the constraints of alternative technologies (sputtering and point source) as well as obtaining more stable composition uniformity and flux efficiencies, low power consumption, and shorter loading and maintenance times.

The control interface can be run by any Fab Manager.

Modularity is the greatest advantage of JET-Line. This cell can be mounted in any position – horizontal / vertical / top down / bottom.

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JET – LINE High Temperature Source

Details

Presentation

Information request

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