Dual filament source – ABN DF

Details

  • More than 11,000 effusion cells in operation worldwide
  • Accentuate hot or cold lip effect
  • Provides a pure, stable and reproducible beam flux
  • Uniformities better than ±1 %
  • Rugged and reliable design
  • Very large range of capacities

Presentation

Dual filament cells are the workhorse for any MBE systems, enabling to evaporate a large range of materials.

The dual filament configuration allow the temperature gradient over the length of the crucible to be varied in order to accentuate either a “hot lip” or “cold lip” type behavior. It prevents condensation at the crucible mouth by heating this zone to a higher temperature.

Eliminating droplets at the cell orifice significantly reduces morphological defect densities (e.g. oval defects) while improving the beam flux stability.

It is highly recommended to use two separate power supply and PID control racks to take maximum advantage of the double filament configuration.

Most of dual filament cells exist in two versions, either equipped with with C-type or K-type thermocouples, in order to adapt the temperature control range, depending on the material to evaporate.

Ranging from 35cc for small MBE systems, up to 3700 cc for production machines, Riber ABN DF dual filament series equipped most of MBE systems in the world

Layout

Technical information

Cell characteristics ABN 135 DF ABN 60/80 DF ABN 150 DF ABN 300 DF ABN 600/700 DF ABN 1700 DF ABN 3700 DF
Source capacity 35 cc 60/80 cc 150 cc 300 cc 600/700 cc 1700 cc 3700 cc
Mounting flange CF35 CF63 CF100 CF125 CF150 CF200 CF250
Temperature stability ±0,2°C
Crucible shape Conical
Crucible material PBN
Filament type Dual Tantalum filament – independently controllable
Thermocouple type* Two C-type
Typical operating temperature 750 – 1200°C
Maximum outgassing temperature Bottom filament 1400 °C / Top filament 1300°C
Power required for maximum temperature**
(top + bottom filaments simutaneously)
400 W 770 W 1315 W 1900 W 3460 W 6000 W 9540 W
Power supply Two power supplies / Two temperature controllers

*Please consult Riber for K type thermocouples
**For some versions and systems adaptations, integrated water cooling can be available

Component interfacing

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