LTI – Low Temperature Injector


  • Molecular beam with stable and uniform intensity
  • Pneumatic run/vent valves – Easy mounting via VCR connections
  • Dedicated model for low temperatures – MO gases, CBr4,…
  • Field proven design
  • Rugged, reliable for long lifetime


Functions of gas injectors used in gas-source MBE and CBE systems are : (1) the introduction of a gas source into the epitaxy chamber, (2) the generation at the substrate of a molecular beam with stable and uniform intensity, (3) the pre-mixing of different gas sources of the same family within a single injector in order to achieve a high degree of material composition uniformity, and (4) the precracking of species, if required.

Depending on the nature of the precursor and its thermal stability relative to the growth temperature, the gas injector operates either at a low temperature (< 100°C, Riber’s LTI series) for preventing both condensation and dissociation of compounds before on-substrate cracking, or at a high temperature (> 600°C, Riber’s HTI series) to thermally decompose the molecular species before impinging on the substrate.

Riber gas injectors are fitted to the evaporation flange through a standard UHV flange, enabling installation on most gas-source MBE and CBE systems. Gas injectors feature independent 1/4 inch VCR® male gas inlets handling up to 2 distinct process gases, for LTI 163 series.

Gas injection lines are equipped with high temperature normally closed pneumatic actuators (200°C max.). Calibrated leak are installed at the run valve level in order to define the accessible flow range, fine adjustment is done via servo-valve, controlled via Baratron pressure transducer. The vent outlet is connected to a vent pump located in the CBr4 gas module (see dedicated page).

The source switching is based on a run/vent operation using a set of two-way valves for each gas line serving the injector. These valves are mounting via VCR connections at the back of the UHV flange. The “run” (to the substrate) and “vent” (to the vent pump) switching valves are located as close as possible to the epitaxy chamber to ensure rapid switching of sources with low transient times (< 1 sec) to produce abrupt layer interfaces.

Single injection – flow adjustment via gas panel

For applications that require to switch between two flow levels quickly, the dual flow (same gas) option is available. Sizes of leak 1 & 2 can be adapted according to the needed flows.


Technical information

Characteristics LTI 163
Maximum gas inlet 1
Number of Run actuators 1 or 2 – dependson pneumaticmodule
Number of Vent actuators 1 or 2 – dependson pneumaticmodule
Gas inlet ¼ inch VCR®
Typical operating temperature < 100°C
Maximum operating temperature 250°C
Heater Single tantalum filament
Thermocouple C type
Outgassing temperature 200°C
Mounting flange CF63
Power supply One power supply
One temperature controller

Component interfacing

Information request

    Please enter the letters and numbers you see in the picture.



    The information collected on this form is recorded in a computerized file by RIBER to answer your questions and requests.

    They are kept for 3 years and are intended for the sales department.

    In accordance with the GDPR directive, you can exercise your right of access to data concerning you and have them rectified by contacting us using this same form.

    For more information: See our privacy policy

    © 2024 Riber - Legal Notice - Privacy Policy - General purchasing conditions / Conditions générales d'achat - Cookies Management - Index Egalité professionnelle