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Dopant sources – ABN D

RIBER - Dopant sources - ABN D
MBE Sources
Technical document
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514 Ko
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Details

  • Low thermal inertia/low volume/uniform beam distribution
  • High thermal efficiency (limits outgassing)
  • Extremely efficient, reliable and reproducible source
  • Provides a pure, stable and reproducible beam flux
  • Crucible volume and shape tailored to dopant evaporation – Dopant uniformities better than ± 1 %
  • Optional integrated water panel/shutter

Presentation

Riber cells for doping applications are designed to obtain both highly stable beams and rapid variations in beam flux over several orders of magnitude. These cells generally employ shallower and more conical crucible to enable the use of lower temperatures for the highest dopant levels and to ensure excellent doping uniformities.

Layout

Technical information

CellcharacteristicsABN 135 D
Source capacity11/22 cc*
Temperature stability±0,2°C
Crucible shapeConical
Crucible materialPBN
Filament typeSingle Tantalum filament
Thermocouple type**C-type
Typical operating temperature600 –1200°C
Maximum outgassing temperature1400 °C
Power supplyOne power supply / One temperature controller
CellcharacteristicsABN 151 D
Source capacity25 cc
Temperature stability±0,2°C
Crucible shapeConical
Crucible materialPBN
Filament typeSingle Tantalum filament
Thermocouple type**C-type
Typical operating temperature600 –1200°C
Maximum outgassing temperature1400 °C
Power supplyOne power supply / One temperature controller
CellcharacteristicsABN 160 D
Source capacity65 cc
Temperature stability±0,2°C
Crucible shapeConical
Crucible materialPBN
Filament typeSingle Tantalum filament
Thermocouple type**C-type
Typical operating temperature600 –1200°C
Maximum outgassing temperature1400 °C
Power supplyOne power supply / One temperature controller
CellcharacteristicsABN 220 D
Source capacity220 cc
Temperature stability±0,2°C
Crucible shapeConical
Crucible materialPBN
Filament typeSingle Tantalum filament
Thermocouple type**C-type
Typical operating temperature600 –1200°C
Maximum outgassing temperature1400 °C
Power supplyOne power supply / One temperature controller
CellcharacteristicsABN 500 D
Source capacity500 cc
Temperature stability±0,2°C
Crucible shapeConical
Crucible materialPBN
Filament typeSingle Tantalum filament
Thermocouple type**C-type
Typical operating temperature600 –1200°C
Maximum outgassing temperature1400 °C
Power supplyOne power supply / One temperature controller
Cellcharacteristics ABN 135 D ABN 151 D ABN 160 D ABN 220 D ABN 500 D
Source capacity 11/22 cc* 25 cc 65 cc 220 cc 500 cc
Temperature stability ±0,2°C
Crucible shape Conical
Crucible material PBN
Filament type Single Tantalum filament
Thermocouple type** C-type
Typical operating temperature 600 –1200°C
Maximum outgassing temperature 1400 °C
Power supply One power supply / One temperature controller

* Crucible dependent – 2 versions – Uniformities will vary
** Please consult Riber for K type thermocouples

Component interfacing

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