Riber launches MBE 8000 for mass epiwafer production

• MBE 8000 joins Riber’s systems catalog
• Twice the productivity of existing products
• Outstanding uniformities achievements
• High performance reproducibility across run after run

Bezons (France), December 19, 2023 – 8:00am (CET) – Riber, the global leader for molecular beam epitaxy (MBE) equipment serving the semiconductor industry, is pleased to announce the final qualification of its MBE 8000 production platform by leading US epiwafer manufacturer.

A new competitive edge for our customers

The MBE 8000 delivers twice the productivity of existing products on the market while enabling outstanding performances. The flexibility of MBE technology enables RIBER’s MBE 8000 to address all compound semiconductor growing markets from VCSEL, transistor, sensors requiring high level of performances in terms of uniformity, reproducibility, and stability.

This system is capable of growing batches of eight 150 mm (6 inches) or four 200 mm (8 inches) wafers, increasing capacity by 50% over the existing products. As cell design, system geometry, process control are identical, it ensures process transfer within a minimum of time and an easy handling for Riber machines operators.

The final qualification step has validated the MBE 8000 in terms of process, robustness, stability, ergonomics, and control. As an example, defect density over 30 runs measured is less than 50 particles per cm² measured on a VCSEL-type structure and on particles in the size of 0.8-8µm.

With an optimum cost of ownership and large capacity, the MBE 8000 system presents strong prospects for business development in the future.

To find out more, information on the MBE 8000 is available at the following link.

RIBER / MBE 8000
Best achievements reported :
• Thickness uniformity of InGaAs/GaAs superlattices over the 8×6’’ platen: 298Å ± 2 Å
• Fabry-Perot dip uniformity of resonator wafers over 8×6” platen: 3nm
• HEMT electron mobility: 178 000 cm²V-1s-1 at 77K

Posted on Tuesday, December 19, 2023 - 08:00 am

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