All Metal Valves
Details
- Right angle all metal valves
- 2 sizes types CF16 & CF35
- Used for MBE chamber purging and roughing
- Very high leak-tightness
Presentation
Riber all metal valves VME series are perfectly suited to stand bakeout operations, while keeping excellent leak tightness, fully compatible with UHV requirements.
Installed on the growth chamber pumping well and on trapping cold fingers, these valves are usually used to purge the chamber with nitrogen when a maintenance opening is needed (VME16) and as a roughing interface (VME35), to generate primary vacuum via a mobile pumping group when the UHV chamber is pumped down.
Technical information
Characteristics | VME 16 | VME 35 |
---|---|---|
ND nominal diameter (mm) | 16 | 40 |
Connecting flanges | 2 x 16 CF Rotatable Knife-edge | 2 x 40 CF Rotatable Knife-edge |
Conductance in open position (l/s) | 5 | 50 |