Cell Shutters

Details

  • Complete blocking of the flux
  • Simple mechanical design
  • No flakes
  • No particle generation
  • Minimizes flux transient
  • Very long lifetime > 1 million cycles

Presentation

Riber’s flagship product rocking shutters are fitted to Compact 21 and MBE 412 / MBE 49 / MBE 6000 / MBE 7000 production systems.

Source shutters are driven by motors allowing for gentle and controlled opening and closing to reduce particle flaking and particle generation, as opposed to pneumatic shutters, which systematically exhibit brutal accelerations and decelerations when operating. The motion is performed so that in the closed position, the shutters cover the entire source mouth. The shutter position for each effusion cell is controlled independently using Crystal Process control software.

The shutter blade is made of high-purity tantalum. The shaft is made of high-purity molybdenum. The shutter blade position is far enough away from the cell mouth to minimize flux transients, yet it is oversized to ensure the complete blocking of flux beams.

Self-contained assemblies facilitate maintenance, as it is only necessary to unbolt a single flange to exchange either an entire shutter module or only a shutter plate.

Rocking Cell shutter assembly

All rocking source shutter guide and process commands are on the air side. Opening / Closing movement is transmitted by a bellow, powered by a stepper motor, controlled by the source shutter controller. For complete safety of the movement, the motor rotate between two limit switches.

Technical information

Characteristics
System compatibility C21 series MBE412 MBE49 MBE6000
Mounting flange CF63 CF100 CF150 CF200
Bakeout temperature 250°C max, motor & cables unmounted
Typical opening / closing speed (ms) 210 210 600 1400
Double blade version for Ga & In available Yes Yes No No
Confinment sarcophage available No No Yes Yes

Please consult Riber for specific requests, such as PBN or double blades

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