MBE 49 – 5×3’’, 4×4’’, 150, 200mm production system
The Riber MBE 49 series of fully automated, production machines set industry standards for material quality, yield, throughput, and costs associated with operation and maintenance. More than 55 of these systems have been delivered worldwide, and the success that they have brought their customers has given this series of reactors a widely held and thoroughly deserved reputation for enabling commercialisation of new compound semiconductor device technologies on a range & scale unrivalled elsewhere .
Four reactors are available in the MBE 49 series, which are specifically designed for depositing arsenides, phosphides, nitrides and oxides. These industry-leading machines have a capacity of 200mm, 150mm, four 4-inch wafers or five 3-inch wafers and feature the capabilities for in-situ monitoring and pre-growth treatment.