Stainless Steel Gate Valves

Details

  • Stainless steel UHV gate valves
  • From CF 35 to CF 300
  • Manual & electro-pneumatic versions
  • Bakeable versions, with Kalrez® gaskets

Presentation

Stainless steel gate valves are used in many different locations in Riber MBE systems and guarantee perfect UHV conditions while securing wafer transfer and pumping sequences.

Pneumatic valves are typicall used in production, automated systems or to secure pumps, when manual valves are rather used on R&D systems or on isolatable devices.

Regarding gaskets, everywhere bakeout is required, Riber used O-ring Kalrez gasket: Kalrez® 4079 is a carbon black filled compound having excellent chemical resistance and mechanical properties. It has a maximum operating temperature of 315°C.

Pneumatic actuators are unmounted for bakeout.

For standard conditions, O-ring Viton gaskets valves are kept.

Technical information

Characteristics
Pressure range 10-10 mbar
Helium leak rate <2.10-9 mbar
Mounting position Any
Bakeout
Valve open 200°C
Valve closed 150°C
Pneumatic version
Pneumatic actuator max temp 60°C
Pneumatic air service 8 bar

 

W X Y Z
VTA 150 M K

W= Gate Valve Model – VTA
X= Nominal size ID – 35 to 300
Y= M : Manual // PC : Pneumatic
Z= Gate Gasket Model – V: Viton // K*= Kalrez

Type VTA35 VTA63 VTA100 VTA150 VTA200 VTA250 VTA300
Nominal diameter (mm) 35 63 100 160 200 250 300
Connecting flanges 2x35CF 2x63CF 2x100CF 2x150CF 2x200CF 2x250CF 2x300CF
Non rotatable
Mechanism Removable

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