Stainless Steel Gate Valves
Details
- Stainless steel UHV gate valves
- From CF 35 to CF 300
- Manual & electro-pneumatic versions
- Bakeable versions, with Kalrez® gaskets
Presentation
Stainless steel gate valves are used in many different locations in Riber MBE systems and guarantee perfect UHV conditions while securing wafer transfer and pumping sequences.
Pneumatic valves are typicall used in production, automated systems or to secure pumps, when manual valves are rather used on R&D systems or on isolatable devices.
Regarding gaskets, everywhere bakeout is required, Riber used O-ring Kalrez gasket: Kalrez® 4079 is a carbon black filled compound having excellent chemical resistance and mechanical properties. It has a maximum operating temperature of 315°C.
Pneumatic actuators are unmounted for bakeout.
For standard conditions, O-ring Viton gaskets valves are kept.
Technical information
| Characteristics | |
|---|---|
| Pressure range | 10-10 mbar |
| Helium leak rate | <2.10-9 mbar |
| Mounting position | Any |
| Bakeout | |
|---|---|
| Valve open | 200°C |
| Valve closed | 150°C |
| Pneumatic version | |
|---|---|
| Pneumatic actuator max temp | 60°C |
| Pneumatic air service | 8 bar |
| W | X | Y | Z |
| VTA | 150 | M | K |
W= Gate Valve Model – VTA
X= Nominal size ID – 35 to 300
Y= M : Manual // PC : Pneumatic
Z= Gate Gasket Model – V: Viton // K*= Kalrez
| Type | VTA35 | VTA63 | VTA100 | VTA150 | VTA200 | VTA250 | VTA300 |
|---|---|---|---|---|---|---|---|
| Nominal diameter (mm) | 35 | 63 | 100 | 160 | 200 | 250 | 300 |
| Connecting flanges | 2x35CF | 2x63CF | 2x100CF | 2x150CF | 2x200CF | 2x250CF | 2x300CF |
| Non rotatable | |||||||
| Mechanism | Removable | ||||||
