Supra Hybrid Platform
GENERATING QUBITS BY CRYOGENIC GROWTH
Unlocking Josephson junction !
- SUPRA UHV hybrid platform for semiconductor / low temperature-superconductor growth
- Capable of Josephson junction compatible at wafer scale
- Control process with EZ Instruments®

From left to right : 35 Growth, Cluster Tool and Supra Chamber
Key Features :
Patented Cryogenic Metal-Growth Reactor
- UHV environment
- Deposition temperature <100k for 3 hours
- Wafer rotation during deposition
- Oxidation capability
- Available in manual mode

Supra chamber with EZ REF displaying on screen
Benefits of Cryogenic Growth
- Lower quasiparticle density,
- Reduced noise sources, and improved coherence times

Transmission electron microscopy image, showing the perfect interface of 20 nm-thick aluminium (111) grown on a GaAs (001) substrate at a temperature <100k for more than 3 hours. Results obtained from Epicentre

First Josephson junction achieved in the framework of Epicentre by Sébastien Plissard and his team.
This development and the results presented were carried out as part of the EPICENTRE joint laboratory with LAAS-CNRS Toulouse (a member of Renatech network).




