V-SG-700 for Se/S

FOR HIGH QUALITY CIGS COATINGS

Details

  • CIGS – CZTS PVD machine
  • OLED Materialization contact
  • Temperature ranging from 100°C – 1500°C

Presentation

The V-S/G-700 source is a compact valved source dedicated to small selenization/sulfuration production lines (roll to roll, hot box, etc.) and R&D vacuum selenization/sulfuration tools. It is specially designed to deliver a constant and stable vapor flux depending on the valve position and the regulation parameters.

The valve mechanism allows a rapid and accurate evaporation rate adjustment on the whole valve aperture range and ensure a quick start-up time as an efficient use of the material load on the entire deposition campaign. The valve also permits isolation of the reservoir from the process chamber to stop material evaporation and deposition.

Heating system is a double zone heater. Each heater is electrically independent and supplied by DC power supply which permit a precise and independent control of the temperature of both zones..

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